| 摘要 |
PROBLEM TO BE SOLVED: To provide a bonding method enabling the mutual strong and efficient bonding of two members with high dimensional accuracy, a bonding body in which the two members are bonded to each other strongly with high dimensional accuracy, a high-integrity droplet discharge head provided with the bonding body, and a droplet discharge apparatus provided with the droplet discharge head. SOLUTION: The bonding method comprises a process (a first process) of forming plasma-polymerized films 3 on surfaces of two substrates, a process (a second process) of irradiating surfaces of the plasma-polymerized films 3 with ultraviolet radiation to activate the surfaces, a process (a third process) of laminating two substrates 2 to each other to obtain the bonding body 1, and a process of pressurizing the bonding body 1 while heating it. The plasma-polymerized films 3 are preferably constituted of polyorganosiloxane as main materials. COPYRIGHT: (C)2009,JPO&INPIT |
