| 摘要 |
A substrate inspection apparatus comprises a projection unit, a lighting unit, an image acquisition unit and a processing unit. The projection unit emits light at a subject being inspected so as to acquire three-dimensional shape information of the subject being inspected. The lighting unit emits two or more lights each having different colors at the subject being inspected. The image acquisition unit receives light emitted from the projection unit and reflected by the subject being inspected, so as to acquire a first image, and receives lights emitted from the lighting unit and reflected by the subject being inspected, so as to acquire a second image. The processing unit acquires brightness information from the acquired first image, acquires color information from the second image acquired by the image acquisition unit, and acquires at least a part of a boundary of a terminal of the subject being inspected, by using the acquired brightness information and color information. Therefore, the accuracy and the reliability of an inspection can be improved. |
