SYSTEMS AND METHODS OF CONTROLLING A MANUFACTURING PROCESS FOR A MICROELECTRONIC COMPONENT

摘要

Systems and methods for controlling manufacturing processes for microelectronic components are provided. In an exemplary embodiment, a method includes determining a specification range for a desired parameter. The microelectronic component is processed in a manufacturing tool, and a trace data set is recorded during the processing. An estimated trace data parameter is determined with the trace data set, and a first measured value of the microelectronic component is measured in a measurement tool. An estimated desired parameter is determined using the first measured value and the estimated trace data parameter, and the manufacturing process is adjusted when the estimated desired parameter is outside of the specification range.

主权项

1. A method of controlling a manufacturing process for a microelectronic component comprising:
determining a specification range for a desired parameter of the microelectronic component; processing the microelectronic component in a manufacturing tool; recording a trace data set while processing the microelectronic component in the manufacturing tool; determining an estimated trace data parameter with the trace data set; measuring a first measured value of the microelectronic component in a measurement tool; determining an estimated desired parameter using the first measured value and the estimated trace data parameter; and adjusting the manufacturing process when the estimated desired parameter is outside of the specification range for the desired parameter.