| 摘要 |
PROBLEM TO BE SOLVED: To provide a novel method for manufacturing a micro lens array.SOLUTION: A method for manufacturing a micro lens array comprises: a powdery body supply step S1 of supplying a glass material powdery body to the surface of a recessed side substrate 11 having recessed shapes arranged and formed in an array shape to form a powdery body layer 12A; a holding step S2 of holding the powdery body layer 12A together with the recessed side substrate 11 by a transparent substrate 12B; a degassing step S3 of performing degassing treatment; a pressing and heating step S4 of integrating a protruded side substrate 12 obtained by clamping, heating and pressing the transparent substrate holding the powdery body layer and the recessed side substrate by a pair of dies to combine the powdery body layer 12A with the transparent substrate 12B, with the recessed side substrate 11; and a cooling step S5 of cooling the integrated protruded side substrate 12 and the recessed side substrate 11. The die surface of one 31 of the pair of dies is a convex surface 31A, and the die surface of the other 32 is a concave surface 32A, and the curvatures thereof are set according to the thermal deformation characteristics of the recessed side substrate and the protruded side substrate. After the cooling step, a micro lens array 10 having a parallel tabular shape as a whole is obtained.SELECTED DRAWING: Figure 1 |
