| 摘要 |
PROBLEM TO BE SOLVED: To provide a waveguide structure for optical coupling, a chip including such a waveguide structure, and a method of fabricating the waveguide structure.SOLUTION: A waveguide structure 100 includes a first waveguide 101 embedded in a cladding 102 having a refractive index lower than that of the first waveguide, and a second waveguide 103 having a refractive index higher than that of the cladding and located at a distance from the first waveguide. The waveguide structure further includes an intermediate waveguide 104 which is located at least in part between the first waveguide and the second waveguide. The first waveguide and the second waveguide each have a tapered end 101w, 103e for coupling light into and/or out of the intermediate waveguide.SELECTED DRAWING: Figure 1 |
