| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve which is simply constructed and easily downsized.SOLUTION: A valve 1 includes an elastomer diaphragm 3 having a protruded part 30 protruded in the direction of a flow path F in which fluid L flows, and a pair of electrodes 51a and 51b which are layered directly or indirectly on the diaphragm 3 and to which voltage is applied. The valve 1 opens/closes the flow path F with the protruded part 30 elastically deformed depending on the voltage. The elastomer diaphragm 3 is flexible, so that it has high sealing performance in the closing state of closing the flow path F. A trouble hardly occurs in a member adjacent thereto. |
