PROTECTIVE SHEET FOR SEMICONDUCTOR, SHEET FOR SEMICONDUCTOR PROCESSING, AND METHOD FOR PROCESSING SEMICONDUCTOR WAFER

摘要

PROBLEM TO BE SOLVED: To provide a protective sheet for a semiconductor that can prevent a wafer from being broken owing to expansion of stagnant air under a vacuum, even if the stagnant air is contained when the protective sheet is stuck on the semiconductor wafer. SOLUTION: The protective sheet for the semiconductor comprises a base material and an adhesive layer formed on its one surface, and a through-hole is formed as penetrating the sheet from one surface to the other surface. COPYRIGHT: (C)2007,JPO&INPIT