| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double-side polishing device on which one of two sets of pairs of upper and lower ring type adjusting mechanisms to restrain warpage of a carrier end part is arranged on the outside of a central gear of a double-side polishing device and the other is arranged on the inside of an internal gear so that both of them hold the carrier end part. <P>SOLUTION: This double-side polishing device 3 to carry out polishing work while supplying an abrasive while vertically pushing a upper surface plate 7 and a lower surface plate 6 on a working object 1 stored in a hole of a carrier has the two sets of the pairs of the upper and lower ring type adjusting mechanisms 9, 10 engaged with both of the central gear 4 and the internal gear 5 of the double-side polishing device and to restrain warpage of the carrier end part 8 rotating while pushed by the upper surface plate on the lower surface plate, and one of them is arranged on the outside of the central gear of the double-side polishing device and the other is arranged on the inside of the internal gear so that both of them hold the carrier end part. <P>COPYRIGHT: (C)2008,JPO&INPIT |
