GAS SENSOR, GAS SENSING MODULE THEREFOR, AND GAS MEASURING SYSTEM USING THEM

摘要

PROBLEM TO BE SOLVED: To provide an ultracompact gas sensor which can be arranged for separated gas piping in semiconductor manufacturing equipment, and provide a gas measuring system using the gas sensor. SOLUTION: The gas sensor includes: a gas sensing element having a dielectric semiconductor and changing its conductivity in response to a gas adsorption state; and a pair of electrodes being electrically connected to the gas sensing element. The gas absorption state of the gas sensing element can be sensed from an electric response varying in response to a voltage which is applied to the pair of electrodes and has periodical changes including polarity reversals. More preferably, the gas sensor has a configuration of connecting a capacitance section to the gas sensing element in series. COPYRIGHT: (C)2009,JPO&INPIT