| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion microscope having an ion beam with a spot size of 10 nm or less at a surface of a sample using a gas field ion source, and excellent in versatility and long term reliability. <P>SOLUTION: The material and shape of a conductive electrode tip 186 of an ion source are optimized to form an atomic layer with a trimer on a surface of the tip, and the tip is allowed to operate in an ultralow temperature condition, so that ionization efficiency with gas helium is improved. Information about a sample is determined by detecting Auger electrons, secondary ions, secondary neutral particles, primary neutral particles, scattered ions, and additional particles such as photons from the sample. <P>COPYRIGHT: (C)2012,JPO&INPIT |
