| 摘要 |
The present invention relates to a deformation ring which generates vacuum suction power while being deformed during a process of contacting a member to be sucked, and a substrate sucking chuck with the same. According to the present invention, the deformation ring comprises: an insertion base unit configured to entirely form a closed loop and inserted into an installation groove to be fixed thereto; a shock absorbing unit formed to be vertically erected on an upper surface of the insertion base unit; and a deformation unit slantly installed at a predetermined installation angle with respect to the shock absorbing unit on an upper surface of the shock absorbing unit, and made of an elastically deformable material. |
