发明名称 |
SUBSTRATE STRUCTURE, SEMICONDUCTOR STRUCTURE AND METHOD FOR FABRICATING THE SAME |
摘要 |
A substrate structure for a micro electro mechanical system (MEMS) device, a semiconductor structure and a method for fabricating the same are provided. In various embodiments, the substrate structure for the MEMS device includes a substrate, the MEMS device, and an anti-stiction layer. The MEMS device is over the substrate. The anti-stiction layer is on a surface of the MEMS device, and includes amorphous carbon, polytetrafluoroethene, hafnium oxide, tantalum oxide, zirconium oxide, or a combination thereof. |
申请公布号 |
US2016207756(A1) |
申请公布日期 |
2016.07.21 |
申请号 |
US201514599218 |
申请日期 |
2015.01.16 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
CHANG Yi-Hsien;WU Tzu-Heng;CHENG Chun-Ren;LIN Shih-Wei;TU Jung-Kuo |
分类号 |
B81B3/00;B81C1/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
1. A substrate structure for a micro electro mechanical system (MEMS) device, comprising:
a substrate; the MEMS device over the substrate; and an anti-stiction layer on a surface of the MEMS device and comprising a material selected from a group consisting of: amorphous carbon, polytetrafluoroethene, hafnium oxide, tantalum oxide, zirconium oxide, and a combination thereof. |
地址 |
HSINCHU TW |