MICROFLUIDIC CHANNELS FOR THERMAL MANAGEMENT OF MICROELECTRONICS

摘要

Heat spreading device using microfabricated microfluidic structures to cool microelectronic devices.

主权项

1. A thermal spreader, comprising a surface for mounting to a device to be cooled or heated, and a plurality of microstructures in thermal communication with the surface, a selected pair of the microstructures having a passageway extending therebetween, the passageway comprising a flow disruptor disposed therein to increase heat transfer therein.