SUSCEPTOR

摘要

A bearing (12) being a recessed section that receives a spindle (20) is provided in a lower surface (10B) of a susceptor (10). The bearing (12) has a tapers from the lower surface (10B) towards an upper surface (10A). A gap (12B) is provided in an side wall (12A) of the bearing (12), further on the outside of the bearing (12) than a fitting surface (12X) between the bearing (12) and the spindle (20) in the horizontal direction. As a result, reduction in the fitting force between the susceptor bearing and the spindle can be suppressed and susceptor temperature reduction in the vicinity of the bearing can also be suppressed.

主权项

1. A susceptor having an upper surface on which a wafer is placed and a lower surface arranged on a side opposite to the upper surface, and configured to be rotated about a spindle which extends in a vertical direction, wherein
a bearing formed of a recessed section receiving the spindle is formed on the lower surface, the bearing has a shape where the bearing is tip-narrowed toward the upper surface from the lower surface, and a gap is formed in a side wall of the bearing such that the gap projects toward the outside of the bearing from a fitting surface between the bearing and the spindle in a horizontal direction perpendicular to the vertical direction.