気相蒸着装置、気相蒸着方法及び有機発光表示装置の製造方法

摘要

A vapor deposition apparatus and method for efficiently performing a deposition process to form a thin film with improved characteristics on a substrate, and a method of manufacturing an organic light-emitting display apparatus. The vapor deposition apparatus includes a chamber (110) including an exhaust port (111); a stage (120) disposed in the chamber, and including a mounting surface (121) on which the substrate (101) is to be disposed; an injection portion (130) including at least one injection opening (131,132) through which a gas is injected in a direction parallel with a surface of the substrate on which the thin film is to be formed; and a plasma generator (180) disposed apart from the substrate to face the substrate.