Ozone Production by Adsorption Using a Noble Gas Additive

摘要

A noble gas (16), preferably helium, is introduced as an additive to an oxygen-containing feed (14) to a dielectric discharge (cold plasma) ozone generator (12) to provide an ozone-containing effluent (26) providing improved performance in an adsorption process (13) for separating the ozone (22) from the oxygen. The amount of make-up noble gas (16) and oxygen (14) required to sustain the ozone generation and recovery process can be reduced by recycling ozone-depleted gas (28) from the adsorption process (13).