Verbesserter Beschleunigungsmessaufnehmer sowie Verfahren zu dessen Herstellung

摘要

An acceleration sensor is shown having a substrate (16, 16', 16'', 16''') on which a capacitor detect plate (24) and source plate mounting portion (28c) are disposed. An electrically conductive blade member (40, 44) having an attachment portion (40a, 44h), a source plate portion (40i, 44a) and integrally attached beams (40b, 40c; 44b) extending along opposite sides of the blade member is mounted on the substrate by welding the attachment portion to a mounting element (36, 36', 36'', 36''') which is closely received in a bore (32, 32', 32'', 32''') formed through the substrate at the source plate mounting portion. The mounting element or the bore is formed with a surface suitable for forming an interference fit and for making electrical engagement with a conductive layer received in the bore. The mounting element has one end (36b, 36b', 36b'') which extends above the top surface (26, 26'') an adjustable selected amount(s) to provide desired spacing between the source plate portion and the detect plate. A single mounting element of a pair of mounting elements can be used and may be in the form of a solid (36, 36'', 36''') or a hollow (36') pin.