发明名称 MANUFACTURING METHOD OF FLAT PANEL DISPLAY MEMBER AND TRANSCRIPTION FILM
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a flat panel display (FPD) member excellent in a flat pattern, and a transcription film suitably used for the manufacturing method. SOLUTION: The manufacturing method of the FPD member comprises a process of forming a non-photosensitive layer (A1) containing inorganic powder and alkali-soluble resin on a substrate, a process of forming a photosensitive layer (B1) containing inorganic powder, alkali-soluble resin, and radiation-sensitive component on the layer (A1), a process of forming a latent image of a pattern by exposing the layer (B1), a process of forming a pattern of the layer (B1) by development treatment, a process of selectively dissolving the layer (A1) through the pattern of the layer (B1) by the development treatment to form a pattern of the layer (A1), and a process of calcinating the obtained patterns. A total light transmission factor of the layer (A1) is larger than that of the layer (B1). COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007103188(A) 申请公布日期 2007.04.19
申请号 JP20050292255 申请日期 2005.10.05
申请人 JSR CORP 发明人 KUDO KAZUO;MASUKO HIDEAKI;NAKAMURA AKIKO
分类号 H01J9/02;H01J11/02;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/36;H01J11/42;H01J11/44 主分类号 H01J9/02
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