A SENSOR INCLUDING A REFERENCE SENSOR ELEMENT

摘要

The invention provides a sensor (800) including a first sensor element (105) formed in a first substrate (110) and at least one optical element formed in a second substrate (816), the first and second substrates being configured relative to one another such that the second substrate forms a cap over the first sensor element, the at least one optical element being configured to guide incident radiation on the cap to the first sensor element. The sensor also includes a reference sensor element (105) whose output can be used to reference the output of the first sensor element.