DEFECT CORRECTING DEVICE AND DEFECT CORRECTING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a defect correcting device repairing a defect present on a workpiece surface by using a rotary tool.

SOLUTION: This defect correcting device is provided with a workpiece holding stage (3) for holding a workpiece (4) having a defect to be corrected; a three-dimensional stage movable inside the XY face opposing the workpiece holding stage (3) and movable to the Z axis direction orthogonal to the XY face; a defect detection unit (7) fitted to the three-dimensional stage, scanning the surface of the workpiece (4) by light beams and detecting a defect present on the workpiece surface; a grinding unit (8) fitted to the three-dimensional stage and removing the detected defect by a rotary grinding device; a grinding unit control means (40) controlling the grinding unit (8); and a clearance detecting means (10) detecting a clearance between the workpiece (4) held on the workpiece holding stage (3) and a grinding head. The position in the Z axis direction of the grinding head is controlled based on the clearance between the workpiece surface and the grinding head.

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