| 摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic actuator structure in which a movable plate can be upsized without raising the manufacturing cost of a planar electromagnetic actuator. SOLUTION: The movable plate 10 comprises a flexible sheet 11 on which a driving coil 4 is formed, a rigid turning plate 12 and a mirror plate 13, the central part 3b of a torsion bar 3 is bonded on a first groove part 12a of the central part of the turning plate 12, and the shaft part 3c of the torsion bar 3 is floated in a second groove part 12b of the turning plate 12. The mirror plate 13 is built on the upper face of the turning plate 12, the flexible sheet 11 on which the driving coil 4 is formed is bonded on the lower face of the turning plate 12 to assembly the movable plate 10. Thus the torsion bar 3 is connected to the central part of the movable plate 10 and the torsion bar 3 is inserted under the movable plate 10. COPYRIGHT: (C)2009,JPO&INPIT
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