| 摘要 |
<P>PROBLEM TO BE SOLVED: To more rapidly and more minutely adjust an interval between an inspected body and a sensor circuit. Ž<P>SOLUTION: According to this inspection method and device, a plurality of sensor circuits are provided and are arranged in an X direction which crosses a Y direction. With the inspected body (12) of a flat plate shape conveyed in the Y direction by a conveyor (14), an inspection signal supplied to the inspected body is detected by a sensor (44), is disposed above a conveying path for the inspected body, while measuring an interval between the inspected body and the sensor in a Z direction crossing the X and Y directions. Based on the measured interval, the inclination of the sensor relative to the inspected body in the X direction is controlled. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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