| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermistor that has flexibility and to which a thermistor film is formed.SOLUTION: A manufacturing method of a thermistor comprises: a film formation step; a first irradiation step; and a second irradiation step. In the film formation step, a fluid dispersion including an oxide nanoparticle of which a particle diameter is less than 1 μm is coated to a base material, and a thermistor precursor film is formed. In the first irradiation step, a pulse laser beam is radiated to the thermistor precursor film in a fluence of 10 mJ/cmto 40 mJ/cm, and a thermistor intermediate film is obtained. In the second irradiation step, the pulse laser beam is radiated to the thermistor intermediate film in the fluence of 45 mJ/cmto 70 mJ/cm, and the thermistor film is obtained. By using such the method, the thermistor has flexibility, and a thermistor film can be formed to the base material of which a heatproof temperature is equal to 200°C or less.SELECTED DRAWING: Figure 3 |
