| 主权项 |
1. A film forming composition comprising:
a polysiloxane represented by the following general formula (1): wherein,R11 is a group each independently selected from the group consisting of a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group, an aryl group, an alkoxy group, an amino group, and an alkylsilyl group, and may be substituted by one or more of groups selected from the group consisting of a halogen atom, an alkyl group, an alkoxy group, an amino group, a silyl group and an alkylsilyl group when R11 is a group other than a hydrogen atom;the total number of amino groups and alkoxy groups contained in all of R11 in the formula is not more than 5% of the total number of R11; andR12 is each independently a hydrocarbon group having 1 to 8 carbon atoms or —R13—N—R142, wherein R13 is a hydrocarbon group having 1 to 5 carbon atoms, and R14 is each independently hydrogen or a hydrocarbon group having 1 to 3 carbon atoms, a polysilazane and an organic solvent. |
