STEAM SUPPLY DEVICE, STEAM DRYING DEVICE, STEAM SUPPLY METHOD AND STEAM DRYING METHOD

摘要

PROBLEM TO BE SOLVED: To solve such a problem that, in steam-drying a substrate having a fine pattern formed thereon, pattern collapse due to moisture contained in an IPA stored originally is generated.SOLUTION: A mixed liquid stored in a mixed liquid storage part 11 is vaporized to produce mixed vapor containing an IPA and water (steam). Then, water contained in the mixed vapor is removed by vapor dehydration means 100 that is connected to a vapor supply pipe through which the mixed vapor is fed. Thus, a moisture concentration contained in the IPA stored originally can be reduced before the mixed vapor is supplied to a substrate, so that pattern collapse can be minimized.SELECTED DRAWING: Figure 1