| 摘要 |
Provided is a scanning probe microscope 10 that comprises a probe 111, a sample holder 113 for holding a sample S, a scanning unit (scanner 114) for causing the probe 111 and the sample holder 113 to move relative to each other so as to scan the surface of the sample S with the probe 111, and a measuring unit 115 for measuring the interaction between the probe 111 and the sample S, and creates an image of the surface of the sample on the basis of the measurement results thereof, wherein the scanning probe microscope 10 is provided with: a measurement data storage unit (data storage unit 120) that stores measurement data obtained by the measuring unit 115; a pre-noise removal frequency spectral data creation unit 122 that, at a predetermined plurality of timings during scanning of the surface, creates pre-noise removal frequency spectral data by Fourier transforming measurement data in the measurement data storage unit obtained within a predetermined period prior to each timing; a post-noise removal frequency spectral data creation unit 123 that creates post-noise removal frequency spectral data by removing either one or both of the background and data of a predetermined frequency band from the noise removal processing data; a post-noise removal measurement data creation unit 124 that creates sample surface image creation data by inverse Fourier transforming the post-noise removal frequency spectral data; and a sample surface image creation unit 125 that creates an image of the surface on the basis of the sample surface image creation data each time the sample surface image creation data is created. |
