发明名称 DEVICE ARCHITECTURE AND METHOD FOR TEMPERATURE COMPENSATION OF VERTICAL FIELD EFFECT DEVICES
摘要 A field effect device is disclosed that provides a reduced variation in on-resistance as a function of junction temperature. The field effect device, having a source junction, gate junction and drain junction, includes a resistive thin film adjacent the drain junction wherein the resistive thin film comprises a material having a negative temperature coefficient of resistance. The material is selected from one or more materials from the group consisting of doped polysilicon, amorphous silicon, silicon-chromium and silicon-nickel, where the material properties, such as thickness and doping level, are chosen to create a desired resistance and temperature profile for the field effect device. Temperature variation of on-resistance for the disclosed field effect device is reduced from the temperature variation for a similar field effect device without the resistive thin film.
申请公布号 EP2973720(A4) 申请公布日期 2016.11.02
申请号 EP20140772971 申请日期 2014.03.13
申请人 D3 SEMICONDUCTOR LLC 发明人 HARRINGTON, THOMAS, E.
分类号 H01L29/66;H01L29/78 主分类号 H01L29/66
代理机构 代理人
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