发明名称 CUTTING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To certainly insert a cutting edge of a cutting blade into between a light-emitting element and a light-receiving element which configure detection means for detecting a position in a cutting and feeding direction of the cutting edge of the cutting blade. <P>SOLUTION: A cutting device is provided with cutting means 3 equipped with a cutting blade 33 having a cutting edge 331 for cutting a workpiece held on a chuck table. The chuck table and the cutting means 3 can relatively move in an X-axis direction, a Y-axis direction, and a Z-axis direction. In the cutting device, a light-emitting element 80 and a light-receiving element 81 are opposite in the Y-axis direction; and Z-axis detection means 8 for detecting a position in the Z-axis direction of the cutting edge 331 of the cutting blade 33, and Y-axis detection mean 9 for detecting a position in the Y-axis direction of the cutting edge 331 are provided. The Y-axis detection means 9 detects the position in the Y-axis direction, and the cutting edge 331 is positioned between the light-emitting element 80 and the light-receiving element 81. By inserting the cutting edge 331 into between the light-emitting element 80 and the light-receiving element 81, the cutting edge 331 is prevented from coming into contact with the light-emitting element 80 or the light-receiving element 81. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012160606(A) 申请公布日期 2012.08.23
申请号 JP20110019690 申请日期 2011.02.01
申请人 DISCO ABRASIVE SYST LTD 发明人 ISHII TAKAHIRO
分类号 H01L21/301 主分类号 H01L21/301
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