| 摘要 |
PROBLEM TO BE SOLVED: To provide a distillation apparatus without the need of discarding a washing liquid and a rinsing liquid when regenerating the rinsing liquid in which the washing liquid is dissolved. SOLUTION: A heat source 22 is installed in a distillation tank 21 of the distillation apparatus 20. A rinsing liquid recovering tank 24 having a cooling coil 23 is installed at an upper part of the distillation tank 21. A washing liquid recovering tank 25 is installed in the distillation tank 21, for recovering washing liquid dissolved in the rinsing liquid by vaporizing the rinsing liquid by the heat source 22. The washing liquid recovering tank 25 has a first sensor 26A detecting the upper limit of the rinsing liquid level and a second sensor 26B detecting the lower limit thereof, and an opening 25M leading the rinsing liquid vaporized by the heat of the heat source 22 to the cooling coil 23. A first leading pipe 31 running the rinsing liquid or recovered washing liquid, a first discharge pipe 41, a second leading pipe and a second discharge pipe 42 are connected to the distillation tank 21 and washing liquid recovering tank 25. COPYRIGHT: (C)2006,JPO&NCIPI
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