| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring surface potential distribution of a substance with high accuracy. SOLUTION: An information of surface potential of a sample is obtained by scanning the surface of the sample by charged particle beam (step 501 to 521), and an appropriate electric charge or distribution model of electric potential is decided depending on the obtained information. An orbit of the charged particle is calculated in compliance with the decided distribution model, and a surface potential distribution state of the sample is determined on a base of the result of the calculation, (step 523 to 535). By the above, behavior of charged particle including curving of the beam or the like which was not taken into consideration in the past is correctly reflected. COPYRIGHT: (C)2007,JPO&INPIT
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