| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonance frequency adjustment apparatus in which resonance frequency is very efficiently adjustable and an oscillation system having an excellent oscillation characteristic is available, and to provide a method of adjusting the resonance frequency. SOLUTION: The resonance frequency adjustment apparatus 1 has: a measurement means 2 which measures the resonance frequency of an oscillation system 60 having a movable plate 611; a laser light irradiation means 4 which irradiates the plate face of the movable plate 611 with laser light and removes a part of the movable plate 611; and a control means 3 which derives a combination of the irradiated position with the laser light on the plate face of the movable plate 611, the intensity of the laser light with which the irradiated position is irradiated, and the irradiation time with the laser light on the basis of the measured result by the measurement means 2, and controls the operation of the laser light irradiation means 4 to perform the derivation of the combination, wherein the moment of inertia of the movable plate 611 around the turning center axis X1 of the movable plate 611 is reduced by removing a part of the movable plate 611 by irradiating the plate face of the movable plate 611 with the laser light, thus the resonance frequency of the oscillation system 60 is adjusted. COPYRIGHT: (C)2008,JPO&INPIT
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