| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of a residual charge during inspection and to enable tact management. SOLUTION: An inspection device for an electrooptical device includes a projection inspection section 12 for projecting the inspection image displayed in the electrooptical device to a projection surface, a signal generation section 13 for supplying an inspection signal to the electrooptical device, and a controller 11. The projection inspection section 12 has a probe 30 for supplying the inspection signal to the electrooptical device and a probe operation mechanism section 33 for controlling the electrical connection of the probe and an electrode terminal of the electrooptical device by moving the probe. The controller 11 controls the signal generation section at the end of the inspection to generate a reset signal and supplies the reset signal to the electrooptical device, then controls the probe operation mechanism section to cut off the electrical connection between the probe and the electrode terminal of the electrooptical device. COPYRIGHT: (C)2008,JPO&INPIT
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