发明名称 METHOD FOR MANUFACTURING SUBSTRATE FOR MAGNETIC RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a magnetic recording medium manufacturing method that can provide a magnetic recording medium for which roll-off at a substrate edge is suppressed, can reduce production cost, and is suitable for automation. SOLUTION: The magnetic recording medium substrate manufacturing method includes mechanically grinding a processed substrate made of single-crystal silicon or a processed substrate made of polycrystal with an ultra abrasive grain grindstone or abrasive grains while switching grinding conditions at two or more levels, thereby causing a mechanically damaged layer of a machined surface after grinding to be 1μm or less. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008310897(A) 申请公布日期 2008.12.25
申请号 JP20070158879 申请日期 2007.06.15
申请人 SHIN ETSU CHEM CO LTD 发明人 YAMAGATA NORIO
分类号 G11B5/84;G11B5/73 主分类号 G11B5/84
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