| 摘要 |
PROBLEM TO BE SOLVED: To easily detect neck breakage.SOLUTION: In pattern inspection, coordinates of the center C2 of a target pore region 63 indicating one target pore are acquired in an inspection image obtained by imaging a printed circuit board formed with a wiring pattern including a land and a line and the pores, a line direction A4 being the direction where the target line connected to the target land formed with the target pore extends with the target land as a starting point is specified on the basis of the reference pattern data indicating the wiring pattern, a point on an object edge the closest to the position where the line extending in the line direction from the center of the target pore region and the edge of the target pore region intersect with each other is acquired as a determination point P2a with a portion being the edge of the target pore region and included in the wiring pattern region 60 indicating the wiring pattern as the object edge 631 in the inspection image, and neck breakage by the target pore is easily detected by determining whether or not the determination point is located outside the target land region 61 indicating the target land.SELECTED DRAWING: Figure 17A |
