| 摘要 |
PROBLEM TO BE SOLVED: To detect a displacement quantity of a moving body, moving in contact with a body to be measured, with high precision.SOLUTION: A plane mirror 253 of a probe 232 is supported at a reference position while abutting on a contacted member 234 when external force from a reference unit 206 does not operates on the probe 232. The plane mirror 253 leaves the contacted member 234 when the probe 232 moves in a Z direction against energizing force of a support mechanism 233. A sensor controller 236 performs arithmetic processing on a measured value corresponding to Z-directional displacement of the probe 232 obtained by a distance sensor 235, and finds a Z-directional displacement quantity of the probe 232. At this time, the sensor controller 236 sets a reference value according to a measured value of the distance sensor 235 when the probe 232 is at the reference position, and corrects a measured value of the distance sensor 235 when the probe 232 leaves the contacted member 234 with the reference value so as to find a displacement quantity.SELECTED DRAWING: Figure 2 |
