| 发明名称 |
RADIATION DETECTOR, ARRAY OF RADIATION DETECTORS AND METHOD FOR MANUFACTURING A RADIATION DETECTOR |
| 摘要 |
A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole. |
| 申请公布号 |
US2016320240(A1) |
申请公布日期 |
2016.11.03 |
| 申请号 |
US201615143176 |
申请日期 |
2016.04.29 |
| 申请人 |
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V. |
发明人 |
WEILER Dirk;MUCKENSTURM Kai-Marcel;HOCHSCHULZ Frank |
| 分类号 |
G01J5/20 |
主分类号 |
G01J5/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Radiation detector comprising a substrate and a membrane, which is suspended above the substrate by a spacer,
wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate; wherein the spacer comprises a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate; wherein the spacer comprises a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole. |
| 地址 |
Munich DE |
