发明名称 |
PROCESSING DEVICE AND METHOD FOR MEASURING WORKPIECE TEMPERATURE IN PROCESSING DEVICE |
摘要 |
Provided are a processing apparatus (1) and a method capable of accurately measuring a real temperature of a workpiece contained and heated in a chamber. The processing apparatus (1) comprises a chamber (2) containing a workpiece (W), a measurement piece (6) installed in the chamber (2), and a measuring unit (8). The measurement piece (6) is capable of thermal expansion and contraction in response to an internal temperature of the chamber (2). The measuring unit (8) measures a thermal expansion and contraction amount of the measurement piece (6) to thereby measure the real temperature of the workpiece (W). |
申请公布号 |
EP2982776(A4) |
申请公布日期 |
2016.11.09 |
申请号 |
EP20140778446 |
申请日期 |
2014.03.11 |
申请人 |
KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) |
发明人 |
FUJII, HIROFUMI |
分类号 |
C23C14/52;C23C14/54;C23C16/44;C23C16/52;G01K5/50 |
主分类号 |
C23C14/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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