| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of near-field light generating element which can manufacture the near-field light generating element with high precision in the relative positions between a core, a clad and a scatterer and the dimension of scatterer. <P>SOLUTION: A concave groove and a V-groove are formed in a clad provided on a substrate, a core and a metallic structure are deposited inside the respective grooves, and then the substrate surface is flattened. The clad is deposited again from above, and then the substrate is cut and the cut surface is polished so that the metallic structure formed inside the V-groove has a prescribed thickness to form a scatterer. <P>COPYRIGHT: (C)2012,JPO&INPIT |
