发明名称 希土類磁石用スパッタリングターゲット及びその製造方法
摘要 PROBLEM TO BE SOLVED: To provide a sintered compact target excellent in mass productivity and reproducibility, and useful for forming a rare earth magnet thin film having excellent magnetic properties, especially a neodymium magnet thin film, and to provide a production method thereof.SOLUTION: In a target for forming a rare earth magnet containing neodymium, iron and boron (or ferroboron) as essential components, the area ratio of a NdFeB phase is 61% or higher, the area ratio of an &alpha;-Fe phase is 8% or lower, and the residual part is constituted of a NdFeBphase (where, 11.9<x<90 at%, 0<y&le;10 at%) and a B phase.
申请公布号 JP6030009(B2) 申请公布日期 2016.11.24
申请号 JP20130052642 申请日期 2013.03.15
申请人 JX金属株式会社 发明人 澤渡 広信
分类号 C23C14/34;B22F1/00;C22C33/02;C22C38/00;H01F10/14;H01F41/18 主分类号 C23C14/34
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