| 摘要 |
PROBLEM TO BE SOLVED: To provide a division device which unfailingly divides an entire region of a plate object where a division starting point is formed regardless of whether a chip size is small or large.SOLUTION: A division device includes: a placement base; frame fixing means fixing an annular frame placed on the placement base; a housing which defines a sealing space, in which a plate object of a plate object unit is housed, at the surface side of the plate unit with an expanded sheet of the plate object unit including the annular frame placed on the placement base; a gas supply source which supplies a gas to the sealing space to expand the expanded sheet of the plate object unit to the rear surface side of the plate object unit; a protruding member which presses the plate object through the expanded sheet to divide the plate object at the rear surface side of the plate object unit in a state where the gas is supplied from the gas supply source to the sealing space and the expanded sheet is expanded to the rear surface side; and protruding member moving means moving the protruding member in a region corresponding to at least the plate object. |
