| 摘要 |
PROBLEM TO BE SOLVED: To improve the detection sensitivity by bonding first and second tuning fork oscillators consisting of monocrystal piezoelectric material in a crystal orientation where piezoelectric phenomena of reverse polarities are caused in width or thickness direction. SOLUTION: This angle sensor, for example, is provided with tuning fork oscillators 1, 2 consisting of a monocrystal piezoelectric material such as quartz, which are bonded and integrated by superposing and thermally treating after hydrophilic treatment. The oscillators 1, 2 have mutually reversed X-axial directions in the main surface direction. Each electrode for driving is provided on the X-Y plane of the arm of the bonded oscillator, and each sensing electrode for detecting the Coriolis force by the angle speed around Y-axis is provided on the Y-Z plane. According to this, the charge generated by the Coriolis force can be laid in the same direction since the X-axis of the arms of the oscillators 1, 2 are reversed, and efficiently detected, and a higher sensitivity can be realized. The structure consisting of a pair of arms bonded to each other in the base parts can be also adapted. |
