发明名称 |
MICROSTRUCTURE DEVICES, METHODS OF FORMING A MICROSTRUCTURE DEVICE AND A METHOD OF FORMING A MEMS DEVICE |
摘要 |
Microstructure devices, methods of forming a microstructure device and a method of forming a MEMS device are described. According to one aspect, a microstructure device includes: a semiconductive substrate; a monolithic microstructure device feature coupled with the semiconductive substrate, and wherein at least a portion of the microstructure device feature is configured to move relative to the semiconductive substrate; and a conductive structure provided directly upon the microstructure device feature. |
申请公布号 |
WO02090244(A2) |
申请公布日期 |
2002.11.14 |
申请号 |
WO2002US13704 |
申请日期 |
2002.05.01 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
GOPAL, VIDYUT;CHINN, JEFFREY, D. |
分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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