发明名称 SOLID STATE IMAGE PICKUP DEVICE, MANUFACTURING METHOD OF THE SAME AND ELECTRONIC EQUIPMENT
摘要 <P>PROBLEM TO BE SOLVED: To improve image quality of a photograph by inhibiting occurrence of "color mixture" etc. <P>SOLUTION: A first trench TR1 and a second trench TR2 having a width wider than that of the first trench TR1 at a portion in a semiconductor substrate 101 shallower than the first trench are formed as a trench TR. And a pinning layer 311 is formed so as to fill the inside of the first trench TR1 and cover an inner surface of the second trench TR2. Further, a light-shielding layer 313 is formed so as to fill the inside of the second trench TR2 via at least the pinning layer 311. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012178457(A) 申请公布日期 2012.09.13
申请号 JP20110040531 申请日期 2011.02.25
申请人 SONY CORP 发明人 ENOMOTO TAKAYUKI
分类号 H01L27/146;H04N5/369;H04N5/374 主分类号 H01L27/146
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