发明名称 METHOD FOR SEVERING BRITTLE MATERIAL BY LASER WITH ASYMMETRIC RADIATION DENSITY DISTRIBUTION
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method for severing brittle materials by lasers with asymmetric radiation density distribution. <P>SOLUTION: In accordance with the method of the invention, flat workpieces of brittle material, e.g., sapphire, glass ceramic, or glass, can be severed by inducing thermomechanical stresses, particularly along severing lines of the same direction, with a laser beam having a beam spot with asymmetric radiation density distribution on the workpiece by a relative movement in different directions in that a mirror-symmetric change in radiation density is brought about exclusively by changing the method parameters. <P>COPYRIGHT: (C)2007,JPO&INPIT</p>
申请公布号 JP2006263819(A) 申请公布日期 2006.10.05
申请号 JP20060072877 申请日期 2006.03.16
申请人 JENOPTIK AUTOMATISIERUNGSTECHNIK GMBH 发明人 EBERHARDT GABRIELE;ZUEHLKE HANS-ULRICH;WEINZIERL UWE;KONDRATENKO VLADIMIR STEPANOVICH
分类号 B23K26/38;B23K26/00;B23K26/073;B23K26/40;H01L21/301;H01S3/00 主分类号 B23K26/38
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