| 摘要 |
PROBLEM TO BE SOLVED: To provide a condensation sensor of high accuracy for measurement, and that is capable of being easily installed and achieving compactness. SOLUTION: The condensation sensor 1a is constituted of a light-projecting device 4 for irradiating a laser beam L; a prism 20 for condensation detection; and a light-receiving device 7 for receiving the laser beam L. The light-projecting device 4; the prism 20 for condensation detection; and the light-receiving device 7 are installed in an isolator 2. The laser beam L, irradiated from the light-projecting device 4 passes through the prism 20 for condensation detection, and the light-receiving device 7 receives the laser beam L deflected at right angles by the prism 20 for condensation detection. Hydrogen peroxide gas X is injected in the isolator 2 to form a condensate 30 in the surface of the prism 20 for condensation detection. The amount of light received is measured by the light-receiving device 7 and the presence or the absence of condensation is grasped. COPYRIGHT: (C)2007,JPO&INPIT
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