发明名称 INFRARED GAS ANALYZER
摘要 PROBLEM TO BE SOLVED: To provide an NDIR stable in performance by storing a pressure sensor package in an airtight space shielded from the outside air in a block and filling the airtight space with a sensitive gas of the same components as the sensitive gas filled in a front and rear chambers of a detecting section. SOLUTION: The infrared analyzer comprises a cell section 30 for introducing a sample gas onto the optical path of infrared rays projected from a light source 21, and the detecting section 40 formed in a block 47 adjacent to the cell section and detecting infrared rays having passed through the cell section 30. The detecting section 40 comprises a front chamber 41 and a rear chamber 42, and a pressure sensor package S for detecting pressure difference between the sensitive gases filled into these two chambers. The package S is stored in an airtight space 54 shielded from the outside air in the block 47, and the airtight space 54 is filled with the sensitive gas of the same components as the sensitive gas filled in the front and rear chambers of the detecting section 30. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007101303(A) 申请公布日期 2007.04.19
申请号 JP20050290019 申请日期 2005.10.03
申请人 SHIMADZU CORP 发明人 KANAMARU NORIAKI
分类号 G01N21/61 主分类号 G01N21/61
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