| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring device capable of acquiring stable measurement accuracy even when performing high frequency characteristic measurement, and a measuring method using it. SOLUTION: This measuring device for measuring characteristics of a semiconductor device includes a base table for placing thereon a semiconductor device which is a measuring object, and a position regulation member for calibration detachable from the base table. COPYRIGHT: (C)2008,JPO&INPIT
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