| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of correcting the optical axis shift of a displacement detection mechanism caused by the difference of a cantilever or a solution or the warpage of the cantilever in the atmosphere or the solution. SOLUTION: In the scanning probe microscope for measurement in a liquid composed of a displacement detection mechanism 10 constituted of a light source part 11 and a light detection part 13 and a cantilever holder 30 having a liquid level holding part 31 comprising a material pervious to the light of the light source part 11, the cantilever holder 30 is constituted so that the thickness of an incident light passing part in the direction vertical to the incident surface 31b of the incident light of the liquid level holding part 31 and the thickness of the reflected light passing part in a direction vertical to a reflected light emitting surface 31c. COPYRIGHT: (C)2008,JPO&INPIT
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