发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing system for processing the design, manufacture and inspection of the semiconductor, in a seamless manner. <P>SOLUTION: The semiconductor manufacturing system has a storage device for storing information related to the design of the semiconductor, and the information related to inspection of the semiconductor, according to an expression format as information with a metadata expressing a role of this information, and has a net work for the storage device for connecting both the storage device and the semiconductor inspecting device. The storage device is made accessible, from the semiconductor inspection device and from a semiconductor design computer, in a seamless manner. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP5022951(B2) 申请公布日期 2012.09.12
申请号 JP20080059491 申请日期 2008.03.10
申请人 发明人
分类号 H01L21/02;H01L21/027 主分类号 H01L21/02
代理机构 代理人
主权项
地址