| 摘要 |
The present invention is to mount a shield mask on a chamber wall except a substrate so that shortening of a preventive maintenance (PM) cycle due to peeling of a deposited film can be prevented. Provided is a shield mask mount fitting for thin film deposition, which comprises a fixing bolt, a bushing, a cap hook, and a shield cap wherein an asymmetric eccentricity structure is applied to one of the cap hook or the shield cap so that a coupling margin of the shield cap can shield surroundings of a fixing hole of the shield mask in the case of coupling. |
